Bird Diagnostic System (BDS2) for your plasma process
Identify & Minimize RF Process Variability
Managing the plasma processes in your Semiconductor process can be quite difficult. Every year new challenges occur and higher accuracies are needed.
The 50 Ohm part of the system is easy to control and monitored, the plasma chamber(no 50 Ohm) however cannot be monitored that easily since the impedance changes continuously.
For this Bird has the the BDS2 system in place which is developed in tight cooperation with Semiconductor manufacturers to get the best results in the field. The BDS2 can measures in parallel voltage, current, and phase. This can be done on multiple fundamental frequencies as on harmonic and intermodulation frequencies.
The system uses a robust frequency tracking algorithm which guarantees accurate measurements under dynamic signal conditions. With this data, power and impedance are calculated at each frequency, giving users the ability to identify small discrepancies that may make the difference between a successful and a failed process. The BDS2 system has an optional Time-Domain mode which allows exceptional visibility into the shape of pulsed RF waveforms in the non-50 ohm environment. Similar to an oscilloscope, the BDS2 will display a one-shot, triggered view of the pulse envelope. Uniquely, however, the BDS2 will display the waveform in voltage, current, phase, power, or impedance to the fully specified accuracy of the system.
NEW: The BDS2 system can detect Micro Arcing which gives the process engineer the possibility to better understand what is happening in the chamber and where the process can be adapted to improve the plasma process.
- 1% accurate measurement of RF voltage and current with a locked system
- Calculated impedance, RF power
- Multi-level pulse or CW waveforms
- 1-3 fundamental frequencies
- 4 harmonics per fundamental frequency
- 6 intermodulation products per fundamental pair
- Time-domain mode
- Tracking & Spectral search mode
- Ethernet enabled
- Chamber to chamber matching
- RF process monitoring
- Impedance matching
- Troubleshooting RF delivery system
- Identify process drifts
- Harmonic levels up to 252 MHz are available for analysis
- Voltage, current, phase and delivered power comparison
You would like to extend the lifetime and expand the capabilities of your legacy tools. Bird has the perfect solution to do so. They even have a special sensor for the AMAT Producer® System which enables advanced measurements in the RF delivery system.